@article{Paulus2023,
    author={Paulus, Simon and Roser, Michael and Mc Kearney, Patrick and Will, Matthias and Schäfer, Sören and Kontermann, Stefan},
    title={Classification of different post-hyperdoping treatments for enhanced crystallinity of IR-sensitive femtosecond-laser processed silicon},
    journal={Semiconductor science and technology},
    volume={38},
    pages={11 Seiten},
    month={01},
    year={2023},
    publisher={IOP Publ.; Bristol},
    school={Hochschule RheinMain, Wiesbaden},
    url={https://hlbrm.pur.hebis.de/xmlui/handle/123456789/98},
    doi={10.25716/pur-76}
}