Classification of different post-hyperdoping treatments for enhanced crystallinity of IR-sensitive femtosecond-laser processed silicon

dc.contributor.author	Paulus, Simon
dc.contributor.author	Roser, Michael
dc.contributor.author	Mc Kearney, Patrick
dc.contributor.author	Will, Matthias
dc.contributor.author	Schäfer, Sören
dc.contributor.author	Kontermann, Stefan
dc.contributor.other	Fachbereich Ingenieurwesen
dc.contributor.other	Institut für Mikrosystemtechnik (IMtech)
dc.date.accessioned	2023-03-09T10:11:09Z
dc.date.available	2023-03-09T10:11:09Z
dc.date.issued	2023-01-13
dc.identifier.uri	https://hlbrm.pur.hebis.de/xmlui/handle/123456789/98
dc.identifier.uri	http://dx.doi.org/10.25716/pur-76
dc.format.extent	11 Seiten
dc.language.iso	en
dc.publisher	IOP Publ.; Bristol
dc.relation.ispartof	Semiconductor science and technology
dc.rights.uri	https://creativecommons.org/licenses/by/4.0/
dc.subject	crystallinity
dc.subject	hyperdoping
dc.subject	sub-bandgap
dc.subject	femtosecond laser
dc.subject	annealing
dc.subject	etching
dc.subject.ddc	500 Naturwissenschaften::530 Physik
dc.title	Classification of different post-hyperdoping treatments for enhanced crystallinity of IR-sensitive femtosecond-laser processed silicon
dc.type	Aufsatz
dcterms.accessRights	open access
pur.source.volume	38
dc.description.version	Published Version
dc.identifier.eissn	1361-6641
pur.source.articlenumber	024002
pur.source.date	2023
dc.identifier.doi	10.1088/1361-6641/acad93
dc.identifier.url	https://doi.org/10.1088/1361-6641/acad93
pur.fundingProject	/ DFG / 429413061
pur.fundingProject	/ BMBF / 03INT701AA

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