Improving the Processing Efficiency of Femtosecond Laser Sulfur Hyperdoping of Silicon by Diffractive Beam Shaping

Mc Kearney, Patrick; Lebershausen, Ingo; Paulus, Simon; Kontermann, Stefan

Author

Date

2023

Version

Published Version

Metadata

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Aufsatz

Keywords

femtosecond-laser hyperdoping
black silicon
beam shaping
spatial light modulator
processing efficiency

DDC Classification

620 Ingenieurwissenschaften
530 Physik

Published in

Journal of Laser Micro/Nanoengineering. (2023). 18, 2, S. 72-76. ISSN: 1880-0688, DOI: 10.2961/jlmn.2023.02.2003

Funding Project

/ / 03INT701AA

Faculty

Fachbereich Ingenieurwesen

Link to publication

https://hlbrm.pur.hebis.de/xmlui/handle/123456789/406
http://www.jlps.gr.jp/jlmn/uploads/23-005z.pdf

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Publikationsnachweise [128]

BibTeX

@article{Mc Kearney2023,
    author={Mc Kearney, Patrick and Lebershausen, Ingo and Paulus, Simon and Kontermann, Stefan},
    title={Improving the Processing Efficiency of Femtosecond Laser Sulfur Hyperdoping of Silicon by Diffractive Beam Shaping},
    journal={Journal of Laser Micro/Nanoengineering},
    volume={18},
    number={2},
    pages={S. 72-76},
    year={2023},
    school={Hochschule RheinMain, Wiesbaden},
    url={https://hlbrm.pur.hebis.de/xmlui/handle/123456789/406}
}