Effective Carrier Lifetime in Ultrashort Pulse Laser Hyperdoped Silicon: Sulfur Concentration Dependence and Practical Limitations

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Author
Schäfer, Sören
Liu, Xiaolong
Mc Kearney, Patrick cc
Paulus, Simon
Radfar, Behrad
Vähänissi, Ville
Savin, Hele
Kontermann, Stefan
Date
2024-05-02
Version
Published Version
DOI
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Aufsatz
Keywords
effective carrier lifetime
hyperdoping
silicon
simulation
wet‐chemical etching
DDC Classification
500 Naturwissenschaften
530 Physik
Published in
physica status solidi (a). Wiley-VCH; Weinheim. 221, 24, 2400132, 8 S.. ISSN: 1862-6300, eISSN: 1862-6319, DOI: 10.1002/pssa.202400132
Funding Project
/ Bundesministerium für Bildung und Forschung / 03INT701AA
/ Bundesministerium für Bildung und Forschung / 03FHP147A
/ Business Finland / 7479/31/2019
/ Academy of Finland / 354199
/ Academy of Finland / 331313
Sponsorship
Gefördert im Rahmen des Projekt DEAL
Faculty
Institut für Mikrosystemtechnik (IMtech)
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BibTeX

@article{Schäfer2024,
    author={Schäfer, Sören and Liu, Xiaolong and Mc Kearney, Patrick and Paulus, Simon and Radfar, Behrad and Vähänissi, Ville and Savin, Hele and Kontermann, Stefan},
    title={Effective Carrier Lifetime in Ultrashort Pulse Laser Hyperdoped Silicon: Sulfur Concentration Dependence and Practical Limitations},
    journal={physica status solidi (a)},
    volume={221},
    number={24},
    pages={8 S.},
    month={05},
    year={2024},
    publisher={Wiley-VCH; Weinheim},
    school={Hochschule RheinMain, Wiesbaden},
    url={https://hlbrm.pur.hebis.de/xmlui/handle/123456789/322},
    doi={10.25716/pur-212}
}

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