
Electronic and structural properties of femtosecond laser sulfur hyperdoped silicon pn-junctions
Aufsatz
Schlagworte
Electronic transport
P-N junctions
Electrostatics
Electron beam induced current
Transmission electron microscopy
Femtosecond lasers
Transition metals
Chemical elements
Secondary ion mass spectrometry
Depth profiling techniques
P-N junctions
Electrostatics
Electron beam induced current
Transmission electron microscopy
Femtosecond lasers
Transition metals
Chemical elements
Secondary ion mass spectrometry
Depth profiling techniques
DDC-Klassifikation
620 Ingenieurwissenschaften
Erschienen in
Applied Physics Letters. AIP Publishing (2013). 103, 6, 061904, 4 S.. DOI: 10.1063/1.4817726
Einrichtung
Fachbereich Ingenieurwesen
Link zur Veröffentlichung
Sammlungen
- Publikationsnachweise [126]
BibTeX
@article{Saring2013,
author={Saring, Philipp and Baumann, Anna Lena and Schlieper-Ludewig, Bettina and Kontermann, Stefan and Schade, Wolfgang and Seibt, Michael},
title={Electronic and structural properties of femtosecond laser sulfur hyperdoped silicon pn-junctions},
journal={Applied Physics Letters},
volume={103},
number={6},
pages={4 S.},
month={08},
year={2013},
publisher={AIP Publishing},
school={Hochschule RheinMain, Wiesbaden},
url={https://hlbrm.pur.hebis.de/xmlui/handle/123456789/446}
}
